Essential maintenance: MBE bake out

Danuta Mendes

To improve the vacuum in the main chamber after essential maintenance a bake-out is traditionally performed on an MBE machine.  The contaminants and moisture adsorbed on the side walls of the main chamber will take longer to desorb and pumped out at room temperature. After using the repeated N2 purge technique outlined in Essential Maintenance: Pump down,  it is entirely possible to recover the vacuum with normal, sustained operation of an MBE system. The process is however fast-tracked by heating the machine for a period of time in excess of 100°C. The result is a lower background pressure and good vacuum within the system. Instructions on how to build your own bake out system can be found in MBE Design and build : Bake out controller.

Our Omicron MBE-STM has been baked in two stages: a mini bake using heater coils, coiled around the main chamber (Fig 1) and a more comprehensive bake by enclosing in a custom built box composed of thermally insulated stainless steel panels (Fig 2).  It is important to short RHEED gun power pins with Al foil static build during the bake out. It is best to regulate the bake out ramp from room temperature to bake out temperature with a PID controller set to 1°C/min. You can use a faster ramp (2°C/min max) and cover the view ports with Al foil in order to buffer against the additional thermal stresses, but an unregulated ramp is not recommended.

The mini bake shown in Fig 1 is more flexible but less comprehensive that the full bake (Fig 2). Heater coils can be wrapped around the chambers that need baking out without the need of unplugging electrical parts or plastic tubing which are used for water cooling the effusion cells. A custom designed bake out jacket with built in heater filaments would be a MBE wardrobe worth investing in 🙂

A full bake out using thermally insulated stainless steel panels (Fig 2) is both temperature and pressure dependent. It is possible to achieve the same vacuum by baking a machine at 200°C for 24 hours, 125°C for 48 hours or 100°C for 60 hours. The maximum bake out temperature is limited by the temperature sensitive parts in the machine. The lowest pressure achievable within a “used” III-As MBE chamber during the bake-out is of the order of 10-7 mBar which can be achieved in ~50 hours at 125°C and typically consists of  As vapour pressure.


 The full bake out  provides a better vacuum as the heat is more uniformly distributed. However, these are more cumbersome to put together and require removal of all electrical and thermally sensitive connections. It is essential to bake the chamber long enough till the moisture and contaminants adsorbed onto the side walls have sufficient thermal energy to be desorbed and eventually pumped out. Since the vapour pressure within the system has been reduced it is possible to reach ultra-high vacuum and good growth conditions which is essential for good epitaxy !

7 thoughts on “Essential maintenance: MBE bake out

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  5. Hello Bastiman,
    Thanks a lot for your blog.
    I have one question regarding the titanium sublimation pump. Can we use the Ti-pump during the bake out stage of MBE (III-IV).

    With regards,

    • That is not recommended. The TSP works by creating a highly reactive film on the inner surface of the system. It works better the colder the inner surface is. Hence it is not so useful during bakeout. I suggest you leave the TSP off during baking, then start to outgas the filaments from low to high power once the system is below 90°C again, then use it to create a good starting vacuum once the system is back to room temperature.

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